SUSS MicroTec, a leading supplier of innovative process and test solutions for the semiconductor industry and related markets, announced today that it is engaging with one of the world’s leading research institutes, the Industrial Technology Research Institute in Tawain, on the development of 3D integration technologies.
GARCHING & MUNICH, Germany--(BUSINESS WIRE)--SUSS MicroTec (FWB:SMH)(GER:SMH), a leading supplier of innovative process and test solutions for the semiconductor industry and related markets, announced today that it is engaging with one of the world’s leading research institutes, the Industrial Technology Research Institute (ITRI) in Tawain, on the development of 3D integration technologies. The Advanced Stacked-System Technology and Application Consortium (Ad-STAC), a multinational research association led by ITRI, will implement the 300mm lithography cluster LithoPack300 and the 300mm bond cluster CBC300 of SUSS MicroTec in its 300mm demo production line at ITRI in Hsin-Chu, Taiwan. With this SUSS MicroTec is joining the consortium and will actively apply its expertise in 3D Integration to further process development.
The Ad-STAC aims at driving technology advances for industrial development in the field of 3D Integration. It consists of 12 multinational companies installing the world’s first 300mm demo-production line, targeting solely at 3D research and development. This line provides state-of-the-art equipment and materials for a wide range of processes. The facility which is open to all parties interested in 3D development offers companies from different fields as well as research institutes a unique environment to develop and test new technologies and products.
The 300mm wafer processing equipment of SUSS MicroTec joining the demo production line represents the core solutions of the SUSS MicroTec 300mm portfolio. The LithoPack300 integrates two latest generation 300mm photolithography modules, the MA300 Gen2 mask aligner and the ACS300 Gen3 spray coater, in one system. The CBC300 is a modular wafer bonding platform configured to run the latest fusion bonding techniques with plasma activation, thermo compression bonding including copper-to-copper (CuCu) bonds for 3D Integration. It offers temporary bonding capability using the latest generation adhesives specifically designed for the 3D applications.
“We are looking forward to SUSS MicroTec joining Ad-STAC,” noted Dr. Ian Chan, VP & EOL General Director of ITRI. “SUSS MicroTec is known as the leading expert in their field so I am confident that their experience will become a real asset to the challenging environment of our demo production line.
“We are proud to have become part of this important alliance in ITRI’s Ad-STAC program,” stated Frank Averdung, CEO and President of SUSS MicroTec. “We will be working with worldwide leading research and industry partners on viable production platforms to enable cost efficient and high yielding manufacturing processes. Being at the forefront of technology development we will be able to directly pass our technology advancements on to our customers to shorten the time to market for our customers’ advanced products.”
SUSS MicroTec has recently released announcements on a range of research activities on 3D integration technology development. An update about the latest advances for challenging 3D integration processes will be provided in a workshop during Semicon Taiwan, October 2, in Hsin-Chu, Taiwan. For further information please visit http://www.suss.com/semicontaiwan_2009.
About SUSS MicroTec
SUSS MicroTec (listed in Deutsche Börse
AG’s Prime Standard) is a leading supplier of process and test solutions
for markets such as 3D Integration, Advanced Packaging, MEMS,
Nanotechnology and Compound Semiconductor. High-quality solutions enable
customers to increase process performance while reducing cost of
ownership. SUSS MicroTec supports more than 8,000 installed mask
aligners, coaters, bonders and probe systems with a global
infrastructure for applications and service. SUSS MicroTec is
headquartered in Garching near Munich, Germany. For more information,
please visit http://www.suss.com
About ITRI
Industrial Technology Research Institute (ITRI) &ndash
a national research organization that serves to strengthen the
technological competitiveness of Taiwan. As of today more than 60% of
the ITRI’s 6,000 employees hold either a Master’s degree or PhD in their
respective field of studies: Communication and Optoelectronics,
Precision Machinery and MEMS, Materials and Chemical Engineering,
Biomedical Technology, Sustainable Development, and Nanotechnology. Our
focus on these six major fields will lay down the foundation for
innovative research in the future of technological industry, and hence,
transform our domestic industry into global bedrock for technological
innovation.
http://www.itri.org.tw
